Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Residual Stress Measurements on Semiconductor Layers Utilizing Stress Relief Techniques

 
: Vogel, D.; Lehr, M.U.; Grillberger, M.; Jaschke, V.; Geisler, H.; Gollhardt, A.; Luczak, F.; Michel, B.

Schmidt, G.:
SCD 2008, Semiconductor Conference Dresden 2008. Workshop-CD : International Conference, Workshop and Exhibition on Chip, Packaging, Design, Simulation and Test. 23. - 24. April 2008, Dresden
Martinsried: Gerotron Communication, 2008
3 pp.
Semiconductor Conference Dresden (SCD) <2008, Dresden>
English
Conference Paper
Fraunhofer IZM ()

: http://publica.fraunhofer.de/documents/N-120489.html