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Focused Ion Beam (FIB) as an Analytical Tool in Micro- and Nanotechnology

 
: Gollhardt, A.; Michel, B.

Micromaterials and nanomaterials 6 (2007), pp.91
ISSN: 1619-2486
International Congress on Microreliability and Nanoreliability in Key Technology Applications (MNR) <1, 2007, Berlin>
English
Conference Paper
Fraunhofer IZM ()

: http://publica.fraunhofer.de/documents/N-120346.html