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Chemistry of mixed ligand all nitrogen coordinated Ta, Hf, and W precursors for metal nitride MOCVD

Poster at Fifteenth European Conference on Chemical Vapor Deposition (EUROCVD-15), September 4-9 2005, Bochum
 
: Baunemann, A.; Rische, D.; Kim, Y.; Parala, H.; Bauer, A.J.; Lemberger, M.; Fischer, R.A.

:
Fulltext urn:nbn:de:0011-n-1200638 (362 KByte PDF)
MD5 Fingerprint: 559dc5af383bf92795f388042dd45151
Created on: 9.3.2010


2005, 1 Folie
European Conference on Chemical Vapor Deposition (EUROCVD) <15, 2005, Bochum>
English
Poster, Electronic Publication
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-120063.html