Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Thermal stability of thin ALD ZrO2 layers as dielectrics in deep trench DRAM devices annealed in N2 and NH3

Poster at E-MRS Fall Meeting, September 17-21 2007, Warsaw
 
: Weinreich, W.; Lemberger, M.; Erben, E.; Heitmann, J.; Wilde, L.; Ignatova, V.A.; Teichert, S.; Schröder, U.; Oberbeck, L.; Bauer, A.J.; Ryssel, H.; Kücher, P.

:
Fulltext urn:nbn:de:0011-n-1200628 (5.3 MByte PDF)
MD5 Fingerprint: 15ca9c9097164e7b8d12761c8842b00b
Created on: 9.3.2010


2007, 1 Folie
European Materials Research Society (Fall Meeting) <2007, Warsaw>
English
Poster, Electronic Publication
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-120062.html