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Micromachined mid-infrared emitter for fast transient temperature operation for optical gas sensing systems

: Hildenbrand, J.; Korvink, J.; Wollenstein, J.; Peter, C.; Kurzinger, A.; Naumann, F.; Ebert, M.; Lamprecht, F.

Preprint urn:nbn:de:0011-n-1190507 (215 KByte PDF)
MD5 Fingerprint: 87697ef6d60b86bbbeeed53a8273d3d9
Created on: 20.10.2012

IEEE Sensors Journal 10 (2010), No.2, pp.353-362
ISSN: 1530-437X
Journal Article, Electronic Publication
Fraunhofer IPM ()
Fraunhofer IWM-H ()
MEMS; filterphotometer; high temperature; infrared; microhotplate; thermal emitter; thermal radiation; thermal source

A micromachined thermal emitter for fast transient temperature operation with a novel hot-plate concept is presented. This concept is based on a nonaxis-symmetric design with excellent mechanical properties during temperature modulation combined with high thermal decoupling. Especially, the mechanical stress induced by the thermal expansion of the hot-plate and their suspension was improved. This results in a reduced sensitivity for buckling of the hot-plate. The thermal emitter is fabricated using silicon on insulator (SOI) technology and KOH-etching. Different suspension structures were realized and mechanical and thermal characterizations were performed. Besides the realization of the new hot-plate suspension design, a high thermal emission at wavelengths > 5 mum has been achieved using ceramic coatings for emissivity enhancement. This kind of emission tuning owns-in contrast to the typical surface and bulk structuring methods-the possibility to act simultaneously as a heater passivation.