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Minienvironments and Thermal Effects

 
: Schließer, J.; Staudt-Fischbach, P.

Institute of Electrical and Electronics Engineers -IEEE-; Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.:
10 Years of Advancing the Science of Semiconductor Manufacturing Excellence. ASMC 99 Proceedings
Mountain View, Calif.: SEMI, 1999
ISBN: 0-7803-5217-3
ISBN: 0-7803-5218-1
ISBN: 0-7803-5219-X
pp.432-439
Advanced Semiconductor Manufacturing Conference (ASMC) <10, 1999, Boston/Mass.>
English
Conference Paper
Fraunhofer IPA ()
contamination control; minienvironment; thermal effect; Substrate Cleanroom; Reinraum; Kontamination

Abstract
The paper will provide information obtained from several experiments and their results. From the obstruction of airflows resulting from such items as hotplates, it has been possible to develop a method for designing minienvironment systems required to handle thermal problems.

: http://publica.fraunhofer.de/documents/N-115.html