Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Minienvironments and Thermal Effects
| Institute of Electrical and Electronics Engineers -IEEE-; Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.:
10 Years of Advancing the Science of Semiconductor Manufacturing Excellence. ASMC 99 Proceedings
Mountain View, Calif.: SEMI, 1999
ISBN: 0-7803-5217-3
ISBN: 0-7803-5218-1
ISBN: 0-7803-5219-X
pp.432-439 |
| Advanced Semiconductor Manufacturing Conference (ASMC) <10, 1999, Boston/Mass.> |
|
| English |
| Conference Paper |
| Fraunhofer IPA () |
| contamination control; minienvironment; thermal effect; Substrate Cleanroom; Reinraum; Kontamination |
Abstract
The paper will provide information obtained from several experiments and their results. From the obstruction of airflows resulting from such items as hotplates, it has been possible to develop a method for designing minienvironment systems required to handle thermal problems.