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Minienvironments and Thermal Effects

: Schließer, J.; Staudt-Fischbach, P.

Institute of Electrical and Electronics Engineers -IEEE-; Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.:
10 Years of Advancing the Science of Semiconductor Manufacturing Excellence. ASMC 99 Proceedings
Mountain View, Calif.: SEMI, 1999
ISBN: 0-7803-5217-3
ISBN: 0-7803-5218-1
ISBN: 0-7803-5219-X
Advanced Semiconductor Manufacturing Conference (ASMC) <10, 1999, Boston/Mass.>
Conference Paper
Fraunhofer IPA ()
contamination control; minienvironment; thermal effect; Substrate Cleanroom; Reinraum; Kontamination

The paper will provide information obtained from several experiments and their results. From the obstruction of airflows resulting from such items as hotplates, it has been possible to develop a method for designing minienvironment systems required to handle thermal problems.