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XUV metrology: Surface analysis with extreme ultraviolet radiation
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2009
Conference Paper
Titel
XUV metrology: Surface analysis with extreme ultraviolet radiation
Author(s)
Banyay, M.
Juschkin, L.
Bücker, T.
Loosen, P.
Hauptwerk
Damage to VUV, EUV, and x-ray optics II
Konferenz
Damage to VUV, EUV, and X-Ray Optics Conference (XDam) 2009
DOI
10.1117/12.833648
File(s)
001.pdf (1.15 MB)
Language
English
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Fraunhofer-Institut für Lasertechnik ILT