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Microprobe analysis of Pt films deposited by beam induced reaction

 
: Park, Y.K.; Takai, M.; Lehrer, C.; Frey, L.; Ryssel, H.

:

Japanese Journal of Applied Physics. Part 1, Regular papers, short notes and review papers 37 (1998), No.12B, pp.7042-7046
ISSN: 0021-4922
English
Journal Article
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-113240.html