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Defects and gallium - contamination during focused ion beam micro machining

 
: Lehrer, C.; Frey, L.; Petersen, S.; Mizutani, M.; Takai, M.; Ryssel, H.

Ryssel, H. ; Institute of Electrical and Electronics Engineers -IEEE-:
Ion Implantation Technology 2000. Proceedings : International Conference on Ion Implantation Technology : Alpbach, Austria, 17 - 22 September 2000
Piscataway, NJ: IEEE Operations Center, 2000
ISBN: 0-7803-6462-7
ISBN: 978-0-7803-6462-2
pp.695-698
International Conference on Ion Implantation Technology (IIT) <13, 2000, Alpbach>
English
Conference Paper
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-113239.html