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Comparison of FIB-induced physical and chemical etching
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1999
Conference Paper
Titel
Comparison of FIB-induced physical and chemical etching
Author(s)
Park, Y.K.
Paszti, F.
Takai, M.
Lehrer, C.
Frey, L.
Ryssel, H.
Hauptwerk
Ion implantation technology 98. International Conference on Ion Implantation Technology. Proceedings. Vol.2
Konferenz
International Conference on Ion Implantation Technology (IIT) 1998
DOI
10.1109/IIT.1998.813794
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB