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Fabrication of field emitter array using focused ion and electron beam induced reaction

 

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Hatzakis, M.:
Micro- and nanoengineering 97 - MNE. Proceedings of the International Conference on Micro- and Nanofabrication 1997
Amsterdam: Elsevier, 1998 (Microelectronic engineering 41/42.1998)
pp.453-456
International Conference on Micro- and Nanofabrication (MNE) <1997, Athen>
English
Conference Paper
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-113237.html