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Microanalysis of masklessly fabricated microstructures using nuclear microprobe
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1998
Conference Paper
Titel
Microanalysis of masklessly fabricated microstructures using nuclear microprobe
Author(s)
Park, Y.K.
Takai, M.
Nagai, T.
Kishimoto, T.
Seidl, A.
Lehrer, C.
Frey, L.
Ryssel, H.
Hauptwerk
Ion beam analysis. Proceedings of the Thirteenth International Conference on Ion Beam Analysis 1997
Konferenz
International Conference on Ion Beam Analysis (IBA) 1997
DOI
10.1016/S0168-583X(97)00709-X
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB