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Microanalysis of masklessly fabricated microstructures using nuclear microprobe

 

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Silva, M.F. da:
Ion beam analysis. Proceedings of the Thirteenth International Conference on Ion Beam Analysis 1997 : Lisbon, Portugal, 27 July - 1 August 1997
Amsterdam: North-Holland, 1998 (Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms 136/138)
pp.373-378
International Conference on Ion Beam Analysis (IBA) <13, 1997, Lisbon>
English
Conference Paper, Journal Article
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-113236.html