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Investigations on the topology of structures milled and etched by focused ion beams
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1996
Journal Article
Titel
Investigations on the topology of structures milled and etched by focused ion beams
Author(s)
Lipp, S.
Frey, L.
Zeitschrift
Journal of vacuum science and technology B. Microelectronics and nanometer structures
DOI
10.1116/1.588630
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB