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EUV microscopy for defect inspection by dark-field mapping and zone plate zooming

 
: Juschkin, L.; Freiberger, R.; Bergmann, K.

:

9th International Conference on X-Ray Microscopy, XRM 2008. Proceedings : July 21 - 25, Zürich, Switzerland
Bristol: IOP Publishing, 2009 (Journal of physics. Conference series 186.2009)
ISSN: 1742-6588
Art. 012030, 3 pp.
International Conference on X-Ray Microscopy (XRM) <9, 2008, Zürich>
English
Journal Article, Conference Paper
Fraunhofer ILT ()

: http://publica.fraunhofer.de/documents/N-113089.html