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Nanocrystalline diamond microelectromechanical resonators

: Sillero, E.; Williams, O.A.; Lebedev, V.; Cimalla, V.; Röhlig, C.-C.; Nebel, C.E.; Calle, F.

Univ. Politecnica de Madrid:
WOCSDICE 2009, 33st Workshop on Compound Semiconductor Devices and Integrated Circuits : Held in Malaga, Spain, in May 17-20, 2009
Malaga, 2009
Workshop on Compound Semiconductor Devices and Integrated Circuits (WOCSDICE) <33, 2009, Malaga>
Conference Paper
Fraunhofer IAF ()
nanocrystalline diamond; MEMS; resonator

Nanocrystalline diamond (NCD) microelectromechanical resonators are presented. The NCD layers were prepared by chemical vapour deposition and the fabricated devices were characterised by magnetomotive resonance. The resonant frequencies of the different flexural modes of several structures were measured in vacuum and ambient pressure conditions. Both analytical and numerical models have been employed to fit the measured data and extract the NCD material parameters, obtaining an acoustic velocity as high as 17283 ± 232 m/s. The mechanical properties, quality factors and damping mechanisms will be discussed.