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Test-structures for wafer level microsystems characterization
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2008
Conference Paper
Titel
Test-structures for wafer level microsystems characterization
Author(s)
Shaporin, A.
Forke, R.
Schmiedel, R.
Dötzel, W.
Hauptwerk
Smart systems integration 2008
Konferenz
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2008
Language
English
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Fraunhofer-Institut fĂĽr Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM