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Fabrication of a low-frequency ultrasonic transducer
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2008
Conference Paper
Titel
Fabrication of a low-frequency ultrasonic transducer
Author(s)
Jia, C.
Wiemer, M.
Hiller, K.
Otto, T.
Gessner, T.
Hauptwerk
Smart systems integration 2008
Konferenz
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2008
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM