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Micro machining technologies for non silicon materials

 
: Baum, M.; Rota, A.; Salk, N.; Otto, T.; Gessner, T.

Gessner, T. ; MESAGO Messe Frankfurt GmbH, Stuttgart:
Smart systems integration 2008 : 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components, Barcelona, Spain, 9 - 10, April 2008
Berlin: VDE-Verlag, 2008
ISBN: 978-3-8007-3081-0
ISBN: 3-8007-3081-2
pp.395-398
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components <2, 2008, Barcelona>
English
Conference Paper
Fraunhofer IFAM ()
Fraunhofer ENAS ()
Fraunhofer IZM ()

: http://publica.fraunhofer.de/documents/N-111571.html