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Fabrication of metallic SPM tips by combining UV nanoimprint lithography and focused ion beam processing

Poster at the MNE 2009, 35th International Conference on Micro and Nano Engineering, Ghent, Belgium
 
: Jambreck, J.D.; Schmitt, H.; Amon, B.; Rommel, M.; Bauer, A.J.; Frey, L.

:
Fulltext urn:nbn:de:0011-n-1064881 (2.2 MByte PDF)
MD5 Fingerprint: 3601d4b243bb7f20f0cd38138079fc57
Created on: 20.10.2009


2009, 1 Folie
International Conference on Micro and Nano Engineering (MNE 2009) <35, 2009, Ghent>
English
Poster, Electronic Publication
Fraunhofer IISB ()
full metal tip; scanning probe microscopy; focused ion beam; nanoimprint lithography

: http://publica.fraunhofer.de/documents/N-106488.html