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Measurement accuracy of fringe projection depending on surface normal direction

: Kühmstedt, P.; Bräuer-Burchardt, C.; Notni, G.


Huang, P.S. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Optical inspection and metrology for non-optics industries : 3 - 4 August 2009, San Diego, California, United States
Bellingham, WA: SPIE, 2009 (Proceedings of SPIE 7432)
ISBN: 978-0-8194-7722-4
Paper 743203
Conference "Optical Inspection and Metrology for Non-Optics Industries" <2009, San Diego/Calif.>
Conference on Optics and Photonics <2009, San Diego/Calif.>
Conference Paper
Fraunhofer IOF ()
measurement accuracy; fringe projection; error analysis; position accuracy; surface accuracy

An accuracy analysis of fringe projection systems is performed taking into account the geometric properties of the sensor and the surface shape of the measuring objects. Especially the deviations of the normal vector directions between the optical axis of projection and observation contribute to differences in the achievable measuring accuracy. An accuracy model was developed which describes the relation between the (fix) geometry of the sensor components and the (variable) conditions of the measurement characterized by a set of parameters on the one side and the measuring accuracy on the other side.