Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Characterisation and modelling of the nanoindentation experiment in Au layers

 
: Wittler, O.; Mrossko, R.; Huber, S.; Gollhardt, A.; Michel, B.

:

Institute of Electrical and Electronics Engineers -IEEE-:
10th International Conference on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2009 : Delft, Netherlands, 26 - 29 April 2009
New York, NY: IEEE, 2009
ISBN: 978-1-4244-4160-0
ISBN: 978-1-4244-4159-4
pp.369-373
International Conference on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) <10, 2009, Delft>
English
Conference Paper
Fraunhofer IZM ()

Abstract
The nanoindentation experiment is an established technique for the determination of Hardness and Young's modulus of thin films. This standard data set is not sufficient to he used as input to finite element simulations, because elastic-plastic material data is being required for analysis of reliability of metal layers. Therefore stress-strain Curves are being determined by fitting the force displacement curves of the experiment with a finite-element model. Additionally this approach enables a solution for the so called substrate effect , because the stiffness of the Substrate can be considered in the fitting model. This known approach is being applied and tested on thin (< 500 nm) gold layers deposited on silicon. It is shown that even for indents that exceed 10 % of the film thickness a good sensitivity for Young's Modulus can be reached, but for the plastic data the results are not unique and a range of plastic properties can be fitted. It is shown, that this problem of the method can be solved by correlation of the indent profiles.

: http://publica.fraunhofer.de/documents/N-103774.html