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Analysis of nanoindentation and nanoscratch experiments of thin amorphous carbon coatings and multilayers

Friction, wear and elastic-plastic deformation
: Paulkowski, D.; Schiffmann, K.


International journal of materials research 100 (2009), No.7, pp.960-967
ISSN: 1862-5282
Journal Article
Fraunhofer IST ()
microhardness; microwear; diamond-like carbon coating; nanoindentation; elastic-plastic deformation

The determination of mechanical properties of thin films is of crucial interest for applications of protective layers. Nanoindentation and nanoscratch experiments of diamond-like carbon coated (100) silicon surfaces under ambient conditions have been performed with a conical indenter on a Hysitron system, mounted on an atomic force microscope system. Single layers and multilayers with hard soft stacking were tested as well. Microhardness, friction and wear behaviour were determined with multi-indentations, single scratches and oscillating multicycles scratch. The indentation experiments revealed that critical force plastic deformation takes place. The oscillating multicycles scratch experiments determined the high wear resistance of the diamond-like carbon coatings. Multilayer systems were compared with single layer coatings.