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Atomic ordering in TiO2 thin films studied by X-ray reflection spectroscopy

: Filatova, E.; Taracheva, E.; Shevchenko, G.; Sokolov, A.; Kozhevnikov, I.; Yulin, S.; Schaefers, F.; Braun, W.


Physica status solidi. B 246 (2009), No.7, pp.1454-1458
ISSN: 0031-8957
ISSN: 0370-1972
Journal Article
Fraunhofer IOF ()

The paper shows the importance of soft X-ray reflection spectroscopy as a non-destructive in-depth characterization tool for the middle atomic ordering in TiO2 thin films. The microstructure of TiO2 films synthesized by magnetron sputtering on Si(100) wafers was characterized by X-ray reflection spectroscopy (XRS), X-ray Diffraction (XRD) method and X-ray reflectometry (XRR). Reflection spectra and calculated absorption spectra were analyzed in the vicinity of Ti L-2,L-3 and O K absorption edges. It was established that the 70 nm TiO2 film is polycrystalline with an anatase structure and homogeneous in depth. The 10 nm TiO2 film is amorphous.