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Friction identification and compensation on nanometer scale

 
: Amthor, A.; Hausotte, T.; Ament, C.; Li, P.; Jäger, G.

Chung, M.J. ; International Federation of Automatic Control -IFAC-:
Proceedings of the 17th IFAC World Congress : July 6 - 11, 2008, Seoul, Korea
Seoul, 2008
ISBN: 978-3-902661-00-5
pp.2014-2019
International Federation of Automatic Control (World Congress) <17, 2008, Seoul>
English
Conference Paper
Fraunhofer IITB ( IOSB) ()

Abstract
This work concerns the modeling and experimental verification of the highly nonlinear friction behavior in positioning on nanometer scale. The main target of this work is to adjust and identify a simple dynamic friction model which allows a model-based estimation of the friction force in combination with the system inertia against displacement. Experiments in the pre-sliding and sliding friction regimes are conducted on an experimental setup. A hybrid two-stage parameter estimation algorithm is used to fit the model parameters based on the experimental data. Finally, the identified friction model is utilized as a model-based feedforward controller combined with a classical feedback controller to compensate the nonlinear friction force and reduce tracking errors.

: http://publica.fraunhofer.de/documents/N-102487.html