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Friction identification and compensation on nanometer scale

: Amthor, A.; Hausotte, T.; Ament, C.; Li, P.; Jäger, G.

Chung, M.J. ; International Federation of Automatic Control -IFAC-:
Proceedings of the 17th IFAC World Congress : July 6 - 11, 2008, Seoul, Korea
Seoul, 2008
ISBN: 978-3-902661-00-5
International Federation of Automatic Control (World Congress) <17, 2008, Seoul>
Conference Paper
Fraunhofer IITB ( IOSB) ()

This work concerns the modeling and experimental verification of the highly nonlinear friction behavior in positioning on nanometer scale. The main target of this work is to adjust and identify a simple dynamic friction model which allows a model-based estimation of the friction force in combination with the system inertia against displacement. Experiments in the pre-sliding and sliding friction regimes are conducted on an experimental setup. A hybrid two-stage parameter estimation algorithm is used to fit the model parameters based on the experimental data. Finally, the identified friction model is utilized as a model-based feedforward controller combined with a classical feedback controller to compensate the nonlinear friction force and reduce tracking errors.