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Fundamental investigations for residual stress measurements in the micrometer range by means of the correlation of magnetic quantities to experimentally determined stress-strain fields

Eigenspannungsmessung im Mikrometerbereich mit Hilfe der Barkhausenrausch- und Wirbelstrommikroskopie
: Altpeter, I.; Kühn, S.; Kopp, M.; Arnold, W.; Kröning, M.

Mücklich, F.:
Fortschritte in der Metallographie. Vortragstexte der 34. Metallographie-Tagung : 13. - 15. September 2000 in Saarbrücken
Frankfurt: Werkstoff-Informationsgesellschaft, 2001 (Praktische Metallographie, Sonderband 32)
ISBN: 3-88355-296-8
Metallographie-Tagung <34, 2000, Saarbrücken>
European Metallographic Conference and Exhibition (EUROMET) <2000, Saarbrücken>
Conference Paper
Fraunhofer IZFP ()
residual stress measurement; stress-strain field

Increasing miniaturization of micromechanic and microelectronic components has directed intensified attention to residual stress measurements with high lateral resolutions. The fundamentals for a quantitative method to measure residual stresses in the micrometer range, which is less timeconsuming and less expensive than X-ray methods, was developed within the framework of a DFG research program. For the first time, the Barkhausen Noise Eddy Current Microscope (BEMI) offers a powerful testing technique that can be used (adequate calibration provided) for non-contact, high-resolution residual stress measurements in the micrometer (µm) range.