A field mill based on the modular MEMs framework Match-X

This paper presents a miniaturised field mill based on the modular MEMS framework Match-X. The field mill will be used for the measurement of the electrostatic field strength of charged surfaces e.g. for the in-situ qualification of semiconductor process equipment. The electrical, geometrical and mechanical Match-X compatible interfaces of the field mill will be explained. Furthermore, a detailed description of the concept for the miniaturisation and development of the measurement electronic and the motor driving electronic will be given. First measurements of charged surfaces proved the functionality of the measurement head.