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Gettering and defect engineering in semiconductor technology XVI

Selected, peer reviewed papers from the GADEST 2015: Gettering and Defect Engineering in Semiconductor Technology, September 20-25, 2015, Bad Staffelstein, Germany
 
: Pichler, Peter

:

Dürnten: Trans Tech Publications, 2016, XII, 498 pp.
Diffusion and defect data. B, Solid state phenomena, 242
International Conference on Gettering and Defect Engineering in Semiconductor Technology (GADEST) <16, 2015, Bad Staffelstein>
ISBN: 978-3-03835-608-0
ISBN: 978-3-0357-0083-1
Deutsche Forschungsgemeinschaft DFG
PI 736/1-1
English
Conference Proceedings
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/H-56815.html