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Handbook of wafer bonding
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2012
Anthology
Title
Handbook of wafer bonding
Person Involved
Ramm, P.
Lu, J.J.-Q.
Taklo, M.M.V.
Publisher
Wiley-VCH
Publishing Place
Weinheim
DOI
10.1002/9783527644223
Language
English
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT