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Field emitter array fabricated using focused ion and electron beam induced reaction
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2000
Journal Article
Titel
Field emitter array fabricated using focused ion and electron beam induced reaction
Author(s)
Yavas, O.
Ochiai, C.
Takai, M.
Park, Y.K.
Lehrer, C.
Lipp, S.
Frey, L.
Ryssel, H.
Hosono, A.
Okuda, S.
Zeitschrift
Journal of vacuum science and technology B. Microelectronics and nanometer structures
DOI
10.1116/1.591310
Language
English
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