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In-production monitoring and control of in situ-chamber clean processes

 
: Roeder, G.; Andrian-Werburg, M. von; Tschaftary, T.; Schneider, C.; Pfitzner, L.; Ryssel, H.; John, P.; Tegeder, V.

AEC/APC Symposium XII 2000. Proceedings. CD-ROM : September 23 - 28, 2000, Lake Tahoe, Nevada
Lake Tahoe, Nev., 2000
Advanced Equipment Control and Advanced Process Control Symposium (AEC/APC) <12, 2000, Lake Tahoe/Nev.>
English
Conference Paper
Fraunhofer IIS B ( IISB) ()

: http://publica.fraunhofer.de/documents/B-90024.html