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Absolute distance measurement with miniaturized fiber-optic white light interferometer

: Bosbach, C.; Depiereux, F.; Pfeifer, T.

Ilic, D. ; International Measurement Confederation -IMEKO-, Budapest:
Metrology in the 3rd millennium : XVII IMEKO world congress, June 22 - 27, 2003, Dubrovnik, Croatia. Book of summaries
Dubrovnik, 2003
IMEKO World Congress <17, 2003, Dubrovnik>
Conference Paper
Fraunhofer IPT ()
white light interferometry; fiberoptic; miniaturisation; distance measurement

White light interferometry or coherence radar is a well known and established measurement technique for years. But especially the field of production technology and medical technology need measurement systems with continuously increasing performance. This paper demonstrates, how the use of special optical components for higher measurement frequencies and the miniaturizing of the sensor tip can enlarge the application fields for this system. First, the fundamental aspects of white light interferometry are presented and lead to the new concept of a distance measurement system. It is shown how the inset of a special stepped mirror in the detection interferometer increases the measurement frequency and how the sensor is miniaturized using a Fabry-Perot interferometer.