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Dynamic behavior of unipolar and bipolar pulsed magnetron sputtering

 
: List, M.; Krause, U.; Wünsche, T.

Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Society of Vacuum Coaters. 44th Annual Technical Conference 2001. Proceedings : April 21-26, 2001, Philadelphia, Pennsylvania
Albuquerque: SVC, 2001
ISSN: 0737-5921
pp.246-251
Society of Vacuum Coaters (Annual Technical Conference) <44, 2001, Philadelphia/Pa.>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/B-89975.html