Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Dynamic behavior of unipolar and bipolar pulsed magnetron sputtering
| Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Society of Vacuum Coaters. 44th Annual Technical Conference 2001. Proceedings : April 21-26, 2001, Philadelphia, Pennsylvania
Albuquerque: SVC, 2001
ISSN: 0737-5921
pp.246-251 |
| Society of Vacuum Coaters (Annual Technical Conference) <44, 2001, Philadelphia/Pa.> |
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| English |
| Conference Paper |
| Fraunhofer FEP () |