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  4. Dynamic behavior of unipolar and bipolar pulsed magnetron sputtering
 
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2001
Conference Paper
Title

Dynamic behavior of unipolar and bipolar pulsed magnetron sputtering

Author(s)
List, M.
Krause, U.
Wünsche, T.
Mainwork
Society of Vacuum Coaters. 44th Annual Technical Conference 2001. Proceedings  
Conference
Society of Vacuum Coaters (Annual Technical Conference) 2001  
Language
English
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP  
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