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Development of three-layer OVD coating based on dual-magnetron reactively sputtered dielectric films
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2001
Conference Paper
Titel
Development of three-layer OVD coating based on dual-magnetron reactively sputtered dielectric films
Author(s)
Glick, I.
Dobrowolski, J.A.
Fahland, M.
Karlsson, P.
Seltmann, W.
Hauptwerk
Society of Vacuum Coaters. 44th Annual Technical Conference 2001. Proceedings
Konferenz
Society of Vacuum Coaters (Annual Technical Conference) 2001
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP