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Development of three-layer OVD coating based on dual-magnetron reactively sputtered dielectric films
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2001
Conference Paper
Title
Development of three-layer OVD coating based on dual-magnetron reactively sputtered dielectric films
Author(s)
Glick, I.
Dobrowolski, J.A.
Fahland, M.
Karlsson, P.
Seltmann, W.
Mainwork
Society of Vacuum Coaters. 44th Annual Technical Conference 2001. Proceedings
Conference
Society of Vacuum Coaters (Annual Technical Conference) 2001
Language
English
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
