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Development of enhanced depth-resolution technique for shallow dopant profiles

 
: Fujita, M.; Tajima, J.; Nakagawa, T.; Abo, S.; Kinomura, A.; Paszti, F.; Takai, M.; Schork, R.; Frey, L.; Ryssel, H.

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Nuclear instruments and methods in physics research, Section B. Beam interactions with materials and atoms 190 (2002), No.1-4, pp.26-33
ISSN: 0168-583X
English
Journal Article
Fraunhofer IIS B ( IISB) ()

: http://publica.fraunhofer.de/documents/B-85632.html