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Al-doped ZnO films deposited by reactive magnetron sputtering in r.f. mode with a single cathode and m.f. mode with dual cathodes

 

Meinema, H.A.:
Advanced coatings on glass & plastics for large-area or high-volume products. Proceedings of the 3rd International Conference on Coatings on Glass 2000
Eindhoven: TNO/TPD, Division Materials Research & Technology, 2000
ISBN: 90-9014255-X
pp.123-124
International Conference on Coatings on Glass (ICCG) <3, 2000, Maastricht>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/B-84777.html