2000
Conference Paper
Title

Al-doped ZnO films deposited by reactive magnetron sputtering in r.f. mode with a single cathode and m.f. mode with dual cathodes

Author(s)
Kon, M.
Shigesato, Y.
Song, P.K.
Frach, P.
Kojima, H.
Suzuki, K.
Mainwork
Conference
Language
English