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Development of a simulation tool for the analysis of workshop influences on interferometrical measurements

 
: Dörner, D.; Bai, A.; Pfeifer, T.

Weck, M. ; European Society for Precision Engineering and Nanotechnology -EUSPEN-; Fraunhofer-Institut für Produktionstechnologie -IPT-, Aachen; Physikalisch-Technische Bundesanstalt -PTB-, Braunschweig:
EUSPEN International Topical Conference on Precision Engineering, Micro Technology, Measurement Techniques and Equipment 2003. Proceedings. Vol.2 : May 19th - 20th, 2003, Aachen, Germany
Voerde: Riehm, 2003
ISBN: 3-926832-30-4
pp.507-510
International Topical Conference on Precision Engineering, Micro Technology, Measurement Techniques and Equipment <2003, Aachen>
English
Conference Paper
Fraunhofer IPT ()
optische Meßtechnik; Interferometrie; simulation

Abstract
In-situ measurements of surface characteristics during grinding and polishing can deliver very helpful information for the process control so that process parameters can be adjusted directly during the fabrication process. Interferometrical form testing may be suited for this task due to its very high accuracy. Furthermore by interferometry the entire surface can be measured in one step, which leads to a reduced production time. However, a disadvantage may be the sensitivity of interferometrical systems to external influences, like machine vibrations, noise or air turbulences. Due to this reason, it is very difficult to perform interferometrical measurements within a production environment. In this paper we present first simulation based results of the analysis of fundamental influences an interferometers operated in-situ. Based an these results a new concept for the integration of interferometers in a machine tool will be developed.

: http://publica.fraunhofer.de/documents/B-83082.html