Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Copper metallization scheme for vertical chip integration
| Zhang, S.-L.:
Materials for advanced metallization. Proceedings of the Fifth European Workshop on Materials for Advanced Metallization : Sigtuna, Sweden, March 5 - 7, 2001
Amsterdam: Elsevier, 2002 (Microelectronic engineering 60.2001,1/2) |
| European Workshop on Materials for Advanced Metallization (MAM) <5, 2001, Sigtuna> |
|
| English |
| Conference Paper |
| Fraunhofer IZM () |