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Copper metallization scheme for vertical chip integration
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2001
Conference Paper
Title
Copper metallization scheme for vertical chip integration
Author(s)
Riedel, S.
Ecke, R.
Schulz, S.E.
Gessner, T.
Wieland, R.
Leutenecker, R.
Klumpp, A.
Ramm, P.
Mainwork
Materials for advanced metallization. Proceedings of the Fifth European Workshop on Materials for Advanced Metallization
Conference
European Workshop on Materials for Advanced Metallization (MAM) 2001
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM