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  4. Copper metallization scheme for vertical chip integration
 
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2001
Conference Paper
Title

Copper metallization scheme for vertical chip integration

Author(s)
Riedel, S.
Ecke, R.
Schulz, S.E.
Gessner, T.
Wieland, R.
Leutenecker, R.
Klumpp, A.
Ramm, P.
Mainwork
Materials for advanced metallization. Proceedings of the Fifth European Workshop on Materials for Advanced Metallization  
Conference
European Workshop on Materials for Advanced Metallization (MAM) 2001  
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
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