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Micro Materials Center Berlin - materials research for MEMS packaging

 
: Michel, B.; Winkler, T.

Materials Week 2001. Proceedings. CD-ROM : Papers, keynotes and plenaries of Materials Week 2001, International Congress on Advanced Materials, their Processes and Applications, 1 - 4 October 2001, International Congress Centre Munich
Frankfurt: Werkstoffwoche-Partnerschaft GbRmbH, 2002
ISBN: 3-88355-302-6
Werkstoffwoche <2001, München>
English
Conference Paper
Fraunhofer IZM ()

: http://publica.fraunhofer.de/documents/B-82693.html