Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Bulk micromachined and wafer bonded resonators for vacuum pressure measurement
| Reichl, H.:
Micro System Technologies 2001 : International Conference & Exhibition on Micro-Electro-, -Opto-, -Mechanical Systems and Components, Düsseldorf, March 27 - 29, 2001
Berlin: VDE-Verlag, 2001
ISBN: 3-8007-2601-7
pp.285-290 |
| International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components <2001, Düsseldorf> |
|
| English |
| Conference Paper |
| Fraunhofer IZM () |