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Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system

: Brünger, W.H.; Eichholz, J.; Hanssen, H.; Friedrich, D.

Journal of vacuum science and technology B. Microelectronics and nanometer structures 21 (2003), No.2
ISSN: 0734-211X
ISSN: 1071-1023
ISSN: 2166-2746
ISSN: 2166-2754
Journal Article
Fraunhofer ISIT ()