Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system
| Journal of vacuum science and technology B. Microelectronics and nanometer structures 21 (2003), No.2
ISSN: 0734-211X
ISSN: 1071-1023
ISSN: 2166-2746
ISSN: 2166-2754 |
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| English |
| Journal Article |
| Fraunhofer ISIT () |