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Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system
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2003
Journal Article
Title
Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system
Author(s)
Brünger, W.H.
Eichholz, J.
Hanssen, H.
Friedrich, D.
Journal
Journal of vacuum science and technology B. Microelectronics and nanometer structures
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
