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Fiber-optic interferometer for absolute distance measurements with high measuring frequency

: Depiereux, F.; Bosbach, C.; Pfeifer, T.


Chugui, Y.V. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.; Technological Design Institute of Scientific Instrument Engineering -TDI SIE-, Novosibirsk; Russian Academy of Sciences, Institute of Laser Physics, Novosibirsk:
Seventh International Symposium on Laser Metrology, Applied to Science, Industry, and Everyday Life 2002. Vol.1 : 9 - 13 September 2002, Novosibirsk, Russia
Bellingham/Wash.: SPIE, 2002 (SPIE Proceedings Series 4900)
ISBN: 0-8194-4686-6
International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life <7, 2002, Novosibirsk>
Conference Paper
Fraunhofer IPT ()
white light interferometry; fiber optic; distance measurement

White light interferometry or coherence radar is a well known and established measurement technique for years. But especially the field of production technology and medical technology need measurement systems with continuously increasing performance. This paper demonstrates, how the use of special optical components for higher measurement frequencies and the miniaturizing of the sensor tip can enlarge the application fields for this system. First, the fundamental aspects of white light interferometry are presented and lead to the new concept of a distance measurement system. It is shown how the inset of a special stepped mirror in the detection interferometer increases the measurement frequency and how the sensor is miniaturized using a Fabry-Perot interferometer.