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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

An overview of plasma sources suitable for dry etching of solar cells

 
: Schaefer, S.; Lautenschlager, H.; Juch, M.; Siniaguine, O.; Lüdemann, R.

IEEE Electron Devices Society:
Twenty-Eighth IEEE Photovoltaic Specialists Conference 2000. Conference record : Anchorage Hilton Hotel, Anchorage, AK, 15 -22 September 2000
Piscataway: IEEE Operations Center, 2000
ISBN: 0-7803-5772-8
ISBN: 0-7803-5773-6
ISBN: 0-7803-5774-4
Photovoltaic Specialists Conference <28, 2000, Anchorage/Alaska>
English
Conference Paper
Fraunhofer ISE ()

: http://publica.fraunhofer.de/documents/B-80010.html