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RTP-processed 17.5 % efficient silicon solar cells featuring a record small thermal budget

 
: Peters, S.; Lautenschlager, H.; Warta, W.; Schindler, R.

Scheer, H. ; European Commission:
Sixteenth European Photovoltaic Solar Energy Conference 2000 : Proceedings of the international conference held in Glasgow, United Kingdom, 1 - 5 May 2000
London: James & James, 2000
ISBN: 1-902916-18-2
pp.1116-1119
European Photovoltaic Solar Energy Conference <16, 2000, Glasgow>
English
Conference Paper
Fraunhofer ISE ()

Abstract
This paper presents the development and analysis of 17.5 % efficient silicon solar cells on 0.9 omega cm PV-grade Cz-Si, featuring a record small thermal budget. The cells have been processed by rapid thermal processing (RTP) using high heating and cooling rates of 100 K/s. The involved processes consist of a 5 s RTP step at 930 °C for the simultaneous formation of phosphorus emitter and aluminium back surface field and a 30 s rapid thermal oxidation (RTO) at 950 °C for emitter passivation. Detailed analysis reveals that the emitter saturation current is reduced by a factor of 3-4 due to RTO passivation in spite of high carrier surface concentration of 4x10(exp 20) cm-3. Current cell efficiencies are limited by poor quality of the Al-BSF as PC-lD simulations show.

: http://publica.fraunhofer.de/documents/B-79668.html