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Sputtering - a key technology for thin film coatings in crystalline silicon solar cell production

 
: Krempel-Hesse, J.; Preu, R.; Lautenschlager, H.; Lüdemann, R.

Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Society of Vacuum Coaters. 43rd Annual Technical Conference 2000. Proceedings : April 15-20, 2000, Denver, Colorado
Albuquerque: SVC, 2000
ISSN: 0737-5921
pp.97
Society of Vacuum Coaters (Annual Technical Conference) <43, 2000, Denver/Colo.>
English
Conference Paper
Fraunhofer ISE ()

: http://publica.fraunhofer.de/documents/B-79656.html