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2002
Journal Article
Titel
Exposure of photosensitive glasses with pulsed UV-laser radiation
Abstract
The photosensitivity in UV-range of some glasses can be used for micro structuring. The irradiated areas crystallize after a thermal treatment. Microstructures are achieved by wet-chemical etching of the crystallized areas. Interactions between UV-laser radiation of different wavelength and the photosensitive glass are investigated. The relationship between process parameters and geometry of microstructures is examined.
Author(s)