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Deposition of titanium dioxide by high-rate, ion-assisted electron beam evaporation

 
: Schiller, N.; Krug, M.; Straach, S.; Neumann, M.

Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Society of Vacuum Coaters. 45th Annual Technical Conference 2002. Proceedings : April 13-18, 2002, Lake Buena Vista, Florida USA
Albuquerque: SVC, 2002
pp.440-442
Society of Vacuum Coaters (Annual Technical Conference) <45, 2002, Lake Buena Vista/Fl.>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/B-77496.html