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Mo/Si-multilayers for EUV applications prepared by pulsed laser deposition (PLD)
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2001
Journal Article
Titel
Mo/Si-multilayers for EUV applications prepared by pulsed laser deposition (PLD)
Author(s)
Braun, S.
Dietsch, R.
Haidl, M.
Holz, T.
Mai, H.
Müllender, S.
Scholz, R.
Zeitschrift
Microelectronic engineering
DOI
10.1016/S0167-9317(01)00425-7
Language
English
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Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS