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Strength and fatigue investigations of polycrystalline silicon
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2001
Conference Paper
Titel
Strength and fatigue investigations of polycrystalline silicon
Author(s)
Bagdahn, J.
Sharpe, W.N.
Schischka, J.
Petzold, M.
Hauptwerk
Reliability, Testing, and Characterization of MEMS and MOEMS Conference
Konferenz
Reliability, Testing, and Characterization of MEMS and MOEMS Conference 2001
Language
English
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Fraunhofer-Institut für Werkstoffmechanik IWM