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  4. Ultra precision manufacturing of self-assembled micro systems
 
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2001
Conference Paper
Title

Ultra precision manufacturing of self-assembled micro systems

Abstract
This paper introduces a new microfabrication technique that combines ultraprecision micro machining (Milling, turning, drilling, and grinding) with sacrifical/structural multi-layer manufacturing processes to produce assembled, three-dimensional microsystems. These systems can comprise true 3-dimensional features that span in size from micrometers through millimeters and can be manufactured from a variety of metallic and polymer materials.
Author(s)
Sharon, Andre
Bilsing, Axel
Lewis, Gordon
Mainwork
Micromachining and microfabrication process technology VII  
Conference
Conference on Micromachining and Microfabrication Process Technology 2001  
Language
English
Fraunhofer-Institut für Produktionstechnologie IPT  
Keyword(s)
  • Mikrobearbeitung

  • MEMS

  • UPSAMS

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