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Ultra precision manufacturing of self-assembled micro systems

: Sharon, A.; Bilsing, A.; Lewis, G.

Karam, J.M. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Micromachining and microfabrication process technology VII : 22 - 24 October 2001, San Francisco, USA
Bellingham/Wash.: SPIE, 2001 (SPIE Proceedings Series 4557)
ISBN: 0-8194-4285-2
Conference on Micromachining and Microfabrication Process Technology <7, 2001, San Francisco/Calif.>
Conference Paper
Fraunhofer IPT ()
Mikrobearbeitung; MEMS; UPSAMS

This paper introduces a new microfabrication technique that combines ultraprecision micro machining (Milling, turning, drilling, and grinding) with sacrifical/structural multi-layer manufacturing processes to produce assembled, three-dimensional microsystems. These systems can comprise true 3-dimensional features that span in size from micrometers through millimeters and can be manufactured from a variety of metallic and polymer materials.