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Micromirrors and micromirror arrays for scanning applications

: Gessner, T.; Kurth, S.; Kaufmann, C.; Markert, J.; Dötzel, W.

Motamedi, M.E.:
MOEMS and miniaturized systems. Proceedings : 18-19 Sept. 2000, Santa Clara, Calif.
Bellingham/Wash.: SPIE, 2000 (SPIE Proceedings Series 4178)
ISBN: 0-8194-3834-0
Conference on MOEMS and Miniaturized Systems <2000, Santa Clara/Calif.>
Conference Paper
Fraunhofer IZM ()

The main focus of this contribution will be the description of already realized applications of micromirrors and micromirror arrays and future opportunities. As an example image projection and environmental monitoring will be discussed. The micro scanning elements where fabricated by using monocrystalline silicon and are convenient for continuous scanning with working frequencies between several 100 Hz up to 100 kHz.